Shuntarou Waki

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 5:00 PM C206 (C206)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[21p-C206-1~13] 7.1 X-ray technologies

2:00 PM - 2:15 PM

[21p-C206-3] Absolute Value Correction Method for EUV Reflectometer

〇(D)Shuntarou Waki¹, Yusuke Tsukui¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)