2:00 PM - 2:15 PM
[21p-C206-3] Absolute Value Correction Method for EUV Reflectometer
Keywords:EUV
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.1 X-ray technologies
[21p-C206-1~13] 7.1 X-ray technologies
Wed. Sep 21, 2022 1:30 PM - 5:00 PM C206 (C206)
Akio Yoneyama(SAGA Light Source), Masahiko Ishino(QST)