Hiroaki Kawata

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 12:30 PM C101 (C101)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-C101-1~13] 7.3 Micro/Nano patterning and fabrication

11:30 AM - 11:45 AM

[20a-C101-10] Fabrication of self-stamding resin thin film with through holes by combined use of thermal imprint and photolithography

〇Hiroaki Kawata¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Metro. Univ.)