Bunta Inoue

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 12:30 PM C101 (C101)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-C101-1~13] 7.3 Micro/Nano patterning and fabrication

10:00 AM - 10:15 AM

[20a-C101-5] Pattern prediction in EB lithography using molecular simulation and deep learning

〇Bunta Inoue¹, Yoshihiko Hirai², Masaaki Yasuda² (1.Osaka Pref. Univ., 2.Osaka Met. Univ.)