Yuusei Kunitou

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 12:30 PM C101 (C101)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-C101-1~13] 7.3 Micro/Nano patterning and fabrication

11:15 AM - 11:30 AM

[20a-C101-9] Study on smart process design for thermal nanoimprint lithography based on deep learning systems

〇(M1C)Yuusei Kunitou¹, Ryuhei Yamamura², Kai Kameyama², Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Metropolitan Univ, 2.Osaka Pref Univ)