Takaya Ninomiya

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 2:00 PM - 5:00 PM A105 (A105)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[20p-A105-1~11] 8.1 Plasma production and diagnostics

2:00 PM - 2:15 PM

△ [20p-A105-1] Development of uniformity diagnostic system to be installed on actual plasma CVD/ALD machines

〇(M2)Takaya Ninomiya¹, Haruhiko Himura¹, Akio Sanpei¹, Miharu Niimoto¹, Shinichiro Inagaki¹ (1.Kyoto Institute of Technology)