Takuya Ishihara

→ Search for Takuya Ishihara in Google Scholar

Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:15 PM - 4:45 PM A301 (A301)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.5 Instrumentation, measurement and Metrology

[20p-A301-1~13] 1.5 Instrumentation, measurement and Metrology

1:15 PM - 1:30 PM

[20p-A301-1] Anti-deposition solutions of the sapphire-based capacitance manometer for semiconductor manufacturing processes

〇Takuya Ishihara¹, Masaru Soeda¹ (1.Azbil Corp.)