Shinnosuke Yasuoka

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:30 PM - 7:00 PM B103 (B103)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[20p-B103-1~19] 6.1 Ferroelectric thin films

3:00 PM - 3:15 PM

[20p-B103-6] [Young Scientist Presentation Award Speech] Examination of scaling down in (Al, Sc)N films for memory applications

〇Shinnosuke Yasuoka¹, Reika Ota¹, Kazuki Okamoto¹, Keisuke Ishihama¹, Takao Shimizu^2,3, Kuniyuki Kakushima¹, Masato Uehara⁴, Hiroshi Yamada⁴, Morito Akiyama⁴, Tomoyuki Koganezawa⁵, Loku Singgappulige Rosantha Kumara⁵, Okkyun Seo⁵, Osami Sakata⁵, Hiroshi Funakubo¹ (1.Tokyo Tech., 2.NIMS, 3.JST PREST, 4.AIST, 5.JASRI)

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