Kazuki Okamoto

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:30 PM - 7:00 PM B103 (B103)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[20p-B103-1~19] 6.1 Ferroelectric thin films

3:30 PM - 3:45 PM

△ [20p-B103-8] The influence of heat treatment under H2 atmosphere on ferroelectricity of (Al, Sc)N thin films

〇(PC)Kazuki Okamoto¹, Shinnosuke Yasuoka¹, Reika Ota¹, Hiroshi Funakubo¹, Naoko Matsui², Toshikazu Irisawa², Koji Tsunekawa² (1.Tokyo Tech., 2.Canon ANELVA Corp.)

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