Kazutada Ikenaga

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 7:00 PM B203 (B203)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20p-B203-1~22] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

5:15 PM - 5:30 PM

[20p-B203-16] Temperature dependence of β-Ga₂O₃ homoepitaxial growth by MOVPE

〇Kazutada Ikenaga^1,2, Taro Nishimura¹, Ken Goto¹, Masato Ishikawa³, Hideaki Machida³, Tomo Ueno¹, Yoshinao Kumagai¹ (1.Tokyo Univ. of Agric. and Tech., 2.TAIYO NIPPON SANSO Corp., 3.Gas-Phase Growth Ltd.)