Takumi Ohtsuki

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 7:00 PM B203 (B203)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20p-B203-1~22] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

6:15 PM - 6:30 PM

[20p-B203-20] Development of Defects with Increased Al Composition in (Al_xGa_1-x)₂O₃ Thin Films

〇Takumi Ohtsuki¹, Masataka Higashiwaki^1,2 (1.NICT, 2.Osaka Metropolitan Univ.)