Kazuyuki Uno

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 7:00 PM B203 (B203)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20p-B203-1~22] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

6:30 PM - 6:45 PM

[20p-B203-21] Growth of α-(AlGa)₂O₃ and α-Ga₂O₃ thin films by mist chemical vapor deposition using acetylacetonated Al and Ga source solutions

〇Kazuyuki Uno¹, Hiroto Tamura¹, Marika Ohta¹ (1.Wakayama Univ.)