2:30 PM - 2:45 PM △ [20p-C101-5] Surface passivation mechanism on Si surfaces by Al-doped ultrathin SiOx formed by immersing in aluminum nitrate aqueous solution 〇(D)Hiroki Nakajima1, Huynh Thi Cam Tu1, Keisuke Ohdaira1 (1.JAIST)