Takeshi Sato

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[21a-A406-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 9:15 AM

[21a-A406-1] SiGe film growth via pulsed laser annealing of Al-Ge alloyed pastes on Si

〇Takeshi Sato¹, Satoru Miyamoto¹, Shota Suzuki^2,3, Marwan Dhamrin^2,3, Noritaka Usami¹ (1.Nagoya Univ., 2.Toyo Aluminium K.K., 3.Osaka Univ.)