Noboru Shimizu

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[21a-A406-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:15 AM - 10:30 AM

[21a-A406-5] Schottky Barrier Characterization of Pt/GeSn Contacts for Opt-Electronics Application

〇Noboru Shimizu¹, Yi Wang¹, Keisuke Yamamoto¹, Shiyu Zhang², Shigehisa Shibayama², Osamu Nakatsuka^2,3, Dong Wang¹ (1.IGSES, Kyushu Univ., 2.GS of Eng., Nagoya Univ., 3.IMaSS, Nagoya Univ.)

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