Tomonari Takayama

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[21a-A406-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:45 AM - 11:00 AM

[21a-A406-7] Fermi-Level Pinning alleviation and Schottky barrier control on metal/poly-crystalline Ge

〇(M2)Tomonari Takayama¹, Kenta Moto^1,2, Kaoru Toko³, Dong Wang¹, Yamamoto Keisuke¹ (1.Kyusyu Univ., 2.JSPS Res. Fellow, 3.Univ. of Tsukuba)