Naohito Miyata

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 12:15 PM C105 (C105)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[21a-C105-1~12] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

9:30 AM - 9:45 AM

[21a-C105-3] Tantalum-oxide thin film formation by electrochemical oxidation method and its application to ReRAM cell formation: effect of water-drop-additions during oxidation

〇Naohito Miyata¹, Manabu Sueki¹, Yoshiaki Ishii¹, Masao Takahashi¹, Masahiro Moniwa¹ (1.Tokyo Univ. of Tecnology)