Gento Toyoda

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 12:15 PM C105 (C105)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[21a-C105-1~12] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

10:45 AM - 11:00 AM

[21a-C105-7] Low resistivity Cu-layer deposition by selective-CVD used CuI as precursor

〇Gento Toyoda¹, Satoshi Yamauchi¹ (1.Ibaraki Univ.)