Yousuke Hanawa

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 12:30 PM C206 (C206)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21a-C206-1~13] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

9:30 AM - 9:45 AM

[21a-C206-3] Effect of ion diffusion and hydration on wet etching phenomena in nanoscale region

〇Yousuke Hanawa¹, Dai Ueda¹, Akiko Harumoto¹, Ichiro Tanabe², Ken-ichi Fukui³ (1.SCREEN HD Co., Ltd., 2.Rikkyo Univ., 3.Osaka Univ.)