Takafumi Kamimura

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 12:30 PM M206 (Multimedia Research Hall)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[21a-M206-1~13] 13.7 Compound and power devices, process technology and characterization

12:00 PM - 12:15 PM

[21a-M206-12] Development of Etching Process for Fabrication of Ga₂O₃ MOSFETs with Self-Aligned Recessed Gate

〇Takafumi Kamimura¹, Masataka Higashiwaki^1,2 (1.NICT, 2.Osaka Metropolitan Univ)