Meiyong Liao

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:30 AM - 11:30 AM P01 (Arena)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[21a-P01-1~16] 6.2 Carbon-based thin films

9:30 AM - 11:30 AM

▲ [21a-P01-3] Air damping effect on the quality factor of single-crystal diamond MEMS resonators

Yinling Chen^1,2, Liwen Sang¹, Yasuo Koide¹, Koizumi Satoshi¹, Xiaoxi Liu², 〇Meiyong Liao¹ (1.National Institute for Material Science, 2.Shinshu University)

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