Takaaki Fukushima

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:00 PM - 6:45 PM A205 (A205)

Oral presentation
| 3 Optics and Photonics
| 3.14 Silicon photonics and integrated photonics (formerly 3.15)

[21p-A205-1~21] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

5:15 PM - 5:30 PM

[21p-A205-16] Low temperature reactive sputtering of AlN film for Si photonics applications

〇(M2)Takaaki Fukushima¹, Jose A. Piedra Lorenzana¹, Takeshi Hizawa¹, Yasuhiko Ishikawa¹ (1.Toyohashi Univ. Tech.)