Keita Yamaguchi

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:00 PM - 6:45 PM A205 (A205)

Oral presentation
| 3 Optics and Photonics
| 3.14 Silicon photonics and integrated photonics (formerly 3.15)

[21p-A205-1~21] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

5:30 PM - 5:45 PM

△ [21p-A205-17] Investigation of Deposition Conditions for SiON with Refractive Index Degrees of Freedom for Waveguide

〇(M2)Keita Yamaguchi¹, Eissa Moataz¹, Yoshitaka Oiso¹, Tomohiro Amemiya^1,2, Nobuhiko Nishiyama^1,2,3 (1.Tokyo Tech, 2.Tokyo Tech IIR, 3.PETRA)