Jun Shibukawa

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 5:30 PM B104 (B104)

Symposium (Oral)
| Symposium
| Semiconductor Manufacturing and Process Technologies for Green Transformation

[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation

2:40 PM - 3:10 PM

[21p-B104-4] Challenge of calculating and reducing LCCO₂ in Semiconductor Production Equipment

〇Jun Shibukawa¹ (1.SCREEN Semiconductor Solutions Co., Ltd)