The 83rd JSAP Autumn Meeting 2022

Toshihiko Kanayama

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 5:30 PM B104 (B104)

  • Symposium (Oral)
  • | Symposium
  • | Semiconductor Manufacturing and Process Technologies for Green Transformation

[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation

4:45 PM - 5:30 PM

[21p-B104-8] Panel Discussion

〇Toshihiko Kanayama1, Koji ICHIMURA2, Jun SHIBUKAWA3, Sumie SEGAWA4, Masahiko ISHIDA5, Hitoshi WAKABAYASHI6, Masaru HORI7, Fumihiro INOUE8 (1.AIST, 2.DNP, 3.SCREEN, 4.TEL, 5.NEC, 6.Tokyo Tech, 7.Nagoya Univ, 8.YNU)