Yuuto Kawato

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:15 PM - 6:45 PM B203 (B203)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21p-B203-1~20] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

6:00 PM - 6:15 PM

△ [21p-B203-18] Fabrication of high-mobility In₂O₃-TFT using Atomic layer deposition

〇Yuuto Kawato¹, Takanori Takahashi¹, Mutsunori Uenuma¹, Masaharu Kobayashi², Yukiharu Uraoka¹ (1.NAIST, 2.IIS, Univ. of Tokyo)