Haruka Tozato

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:15 PM - 6:45 PM B203 (B203)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21p-B203-1~20] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

1:30 PM - 1:45 PM

△ [21p-B203-2] Time-of-flight mass spectrometric study of metalorganic vapor phase epitaxy process of β-Ga₂O₃

〇(M1)Haruka Tozato¹, Taro Nishimura¹, Kazutada Ikenaga^1,2, Shogo Sasaki³, Ken Goto¹, Masato Ishikawa⁴, Hideaki Machida⁴, Yoshinao Kumagai^1,3 (1.Tokyo Univ. of Agric. and Tech., 2.TAIYO NIPPON SANSO Corp., 3.TUAT FLOuRISH, 4.Gas-Phase Growth Ltd.)