CHIATSONG CHEN

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 4:30 PM C105 (C105)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[21p-C105-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

3:30 PM - 3:45 PM

▲ [21p-C105-8] Highly-asymmetric-strain (110) SiGe-on-insulator pMOSFETs with extremely-thin body channels down to 3.2 nm fabricated by using Ge condensation technique

〇CHIATSONG CHEN¹, Xueyang Han¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. of Tokyo)