Shohei Fukaya

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 4:30 PM C106 (C106)

Oral presentation
| 6 Thin Films and Surfaces
| 6.5 Surface Physics, Vacuum

[21p-C106-1~11] 6.5 Surface Physics, Vacuum

3:45 PM - 4:00 PM

[21p-C106-9] Effect of a LiF layer on passivation performance of TiO_x/SiO_y/crystalline Si heterostructures after metallization

〇(M2)Shohei Fukaya¹, Kazuhiro Gotoh¹, Takuya Matsui², Hitoshi Sai², Yasuyoshi Kurokawa¹, Noritaka Usami¹ (1.Graduate School of Eng., Nagoya Univ., 2.GZR, AIST)