Yusuke Tsukui

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 5:00 PM C206 (C206)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[21p-C206-1~13] 7.1 X-ray technologies

2:15 PM - 2:30 PM

[21p-C206-4] Correction of Coma Aberrations on High Magnification Objective for EUV Microscopy

〇Yusuke Tsukui¹, Shuntaro Waki¹, Mashine Iori¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)