Yubo Wang

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 5:00 PM C206 (C206)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[21p-C206-1~13] 7.1 X-ray technologies

2:45 PM - 3:00 PM

▼ [21p-C206-6] A high-transmittance Schwarzschild objective (SO) to focus high-intensity EUV-VUV light from laser-plasma light source

〇(M2)Yubo Wang¹, Tanaka Nozomi¹, Katsunobu Nishihara¹, Shinsuke Fujioka¹, Atsushi Sunahara^1,2, Tomoyuki Johzaki^1,3, Kyung Sik Kang⁴, Youngduk Suh⁴, Jeong-Gil Kim⁴, Shinji Ueyama⁵, Ken Ozawa⁵ (1.ILE Osaka Univ., 2.Purdue University, 3.Hiroshima University, 4.Samsung MR, 5.Samsung R&D Institute Japan)

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