Yoshiyuki Honda

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 5:00 PM C206 (C206)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[21p-C206-1~13] 7.1 X-ray technologies

3:00 PM - 3:15 PM

[21p-C206-7] Measurement of Sn ion energy to extend lifetime of the collector mirror for EUV light source

〇Yoshiyuki Honda¹, Shinji Nagai¹, Hirokazu Hosoda¹, Yuto Nakayama², Takeru Niinuma², Masaki Kume², Takeshi Higashiguchi² (1.Gigaphoton Inc., 2.Utsunomiya Univ.)

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