Toshiaki Tsuchiya

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 11:45 AM A102 (A102)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[22a-A102-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

9:00 AM - 9:15 AM

[22a-A102-1] Direct observation of electron capture processes in amphoteric defect states achieved by charge pumping in individual defects at MOS interface (4) -Lattice relaxation-

〇Toshiaki Tsuchiya¹, Masahiro Hori¹, Yukinori Ono¹ (1.Shizuoka Univ.)

9:15 AM - 9:30 AM

[22a-A102-2] Direct observation of electron capture processes in amphoteric defect states achieved by charge pumping in individual defects at MOS interface (5) -Discrimination between Type 4 & 5-

〇Toshiaki Tsuchiya¹, Masahiro Hori¹, Yukinori Ono¹ (1.Shizuoka Univ.)