Kotaro Matsuguchi

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 12:00 PM B204 (B204)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[22a-B204-1~11] 13.7 Compound and power devices, process technology and characterization

11:45 AM - 12:00 PM

[22a-B204-11] 3-dimensional imaging of transient variation of temperature distribution
in silicon wafers during Joule’s heating

〇(M2)Kotaro Matsuguchi¹, Jiawen Yu¹, Hiroaki Hanafusa¹, Takuma Sato¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)