Akira Inoue

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 12:00 PM B204 (B204)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[22a-B204-1~11] 13.7 Compound and power devices, process technology and characterization

10:45 AM - 11:00 AM

△ [22a-B204-7] Critical angle of MeV Al-ion channeling implantation into SiC

〇Akira Inoue¹, Mitsuaki Kaneko¹, Yoshiyuki Yonezawa², Tsunenobu Kimoto¹ (1.Kyoto Univ., 2.AIST)