Takumi Numata

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 12:00 PM C301 (C301)

Oral presentation
| 3 Optics and Photonics
| 3.6 Laser processing (formerly 3.7)

[22a-C301-1~11] 3.6 Laser processing (formerly 3.7)

9:30 AM - 9:45 AM

[22a-C301-3] Solid-phase epitaxial growth of impurity-doped β-Ga₂O₃ thin films by RT-excimer laser annealing

〇(M1)Takumi Numata¹, Ryoya Kai¹, Tomoaki Oga¹, Satoru Kaneko², Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.KISTEC)