Kosuke Takenaka

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:30 AM - 11:30 AM P04 (Arena)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[22a-P04-1~14] 8 Plasma Electronics(Poster)

9:30 AM - 11:30 AM

[22a-P04-5] Analysis of Droplet-Vaporization Behavior in Plasma for Formation of 3D Nanostructured Zinc Oxide Thin Films by Plasma-assisted Mist CVD

〇Kosuke Takenaka¹, Susumu Toko¹, Yuichi Setsuhara¹ (1.Osaka Univ.)

Thu. Sep 22, 2022 1:00 PM - 5:00 PM A406 (A406)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[22p-A406-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

3:15 PM - 3:30 PM

[22p-A406-9] Low-temperature Formation of High-Performance IGZO Thin Film Transistors using Reactive Plasma Processes

〇Kosuke Takenaka¹, Yuji Hayashi¹, Susumu Toko¹, Akinori Ebe², Yuichi Setsuhara¹ (1.Osaka Univ., 2.EMD Corp.)