Yuji Kasashima

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:30 AM - 11:30 AM P04 (Arena)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[22a-P04-1~14] 8 Plasma Electronics(Poster)

9:30 AM - 11:30 AM

[22a-P04-7] Feasibility study of monitoring of particle generation in plasma etching process
by load impedance measurement

〇Yuji Kasashima¹, Tatsuo Tabaru¹, Takashi Ikeda² (1.AIST, 2.Nippon Tungsten)