Yuya Sasaki

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 7:00 PM A202 (A202)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[22p-A202-1~22] 6.2 Carbon-based thin films

1:00 PM - 1:15 PM

[22p-A202-1] Effects of Hydrogen and Argon Dilution on the Electrical Properties of Silicon and Nitrogen Doped Diamond-Like Carbon Films by Plasma-Enhanced CVD

〇Yuya Sasaki¹, Hiroya Osanai¹, Yuta Murono¹, Masayoshi Sato¹, Yasuyuki Kobayashi¹, Yoshiharu enta¹, Yushi Suzuki¹, Hideki Nakazawa¹ (1.Hriosaki Univ.)

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