Haruhiko Ito

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 7:00 PM A202 (A202)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[22p-A202-1~22] 6.2 Carbon-based thin films

1:30 PM - 1:45 PM

[22p-A202-3] Fabrication of a-CN_x:H films with high nitrogen content from the microwave plasma CVD of the C₂H₂/N₂ gas mixture ¾ Is [N]/([N]+[C])>0.5 attainable?

〇Haruhiko Ito¹, Yuga Sato¹, Tsuneo Suzuki¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ Tech)