The 83rd JSAP Autumn Meeting 2022

Hirotaka Terai

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 2:45 PM A306 (A306)

  • Oral presentation
  • | 11 Superconductivity
  • | 11.5 Junction and circuit fabrication process, digital applications

[22p-A306-1~7] 11.5 Junction and circuit fabrication process, digital applications

2:15 PM - 2:30 PM

[22p-A306-6] Uniformity of TiN films grown on Si (100) substrates

〇Hirotaka Terai1, Kunihiro Inomata2, Atsushi Kobayashi3, Hiroshi Fujioka3, Hiroki Yoshinaka4, Tsuyoshi Kodama4, Yuuji Hishida1, Sunmi Kim1, Taro Yamashita5, Tomoko Fuse1, Fumiki Yoshihara1,6, Kouichi Semba1,7 (1.NICT, 2.AIST, 3.IIS, Univ. of Tokyo, 4.Hamamatsu Photonics, 5.Tohoku Univ., 6.Tokyo Univ. of Sci., 7.Univ. of Tokyo)