Akihiro Yamamoto

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 5:00 PM A406 (A406)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[22p-A406-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

4:00 PM - 4:15 PM

△ [22p-A406-12] Effect of Amplitude Modulated Discharge Method on TEOS Plasma CVD

〇Akihiro Yamamoto¹, Iori Nagao¹, Yuma Yamamoto¹, Michihiro Otaka¹, Daisuke Yamashita¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Naoto Yamashita¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1.Kyushu Univ., 2.NINS.)

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