Takahiro Goya

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 5:00 PM A406 (A406)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[22p-A406-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:15 PM - 1:30 PM

△ [22p-A406-2] Effects of Plasma-damaged Surface Structure on Mechanical Property Change in Silicon Nitride Films

〇Takahiro Goya¹, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ.)