Akiko Hirata

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 5:00 PM A406 (A406)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[22p-A406-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:30 PM - 1:45 PM

△ [22p-A406-3] 【Highlighted Presentation】Surface Reaction Mechanisms to Realize High-throughput SiN ALE

〇Akiko Hirata¹, Masanaga Fukasawa¹, J. U. Tercero², Katsuhisa Kugimiya¹, Yoshiya Hagimoto¹, Kazuhiro Karahashi², Satoshi Hamaguchi², Hayato Iwamoto¹ (1.Sony Semiconductor Solutions Corp., 2.Osaka Univ.)

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