Kazunori Shinoda

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 5:00 PM A406 (A406)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[22p-A406-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:45 PM - 2:00 PM

[22p-A406-4] Self-limiting cyclic etching of SiGe by using plasma-assisted thermal-cyclic method

〇Kazunori Shinoda¹, Katsuya Miura¹, Kenji Maeda², Masaru Izawa², Thi-Thuy-Nga Nguyen³, Kenji Ishikawa³, Masaru Hori³ (1.Hitachi R&D, 2.Hitachi High-Tech, 3.Nagoya Univ.)

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