Keita Ichikawa

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 5:00 PM A406 (A406)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[22p-A406-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:45 PM - 3:00 PM

[22p-A406-8] [Young Scientist Presentation Award Speech] Imaging measurement of angular distribution of high-speed particles from a dual-frequency capacitively-coupled plasma incident on an RF electrode

〇Keita Ichikawa¹, Haruka Suzuki¹, Daiki Iino², Hiroyuki Hukumizu², Kazuaki Kurihara², Hirotaka Toyoda^1,3 (1.Nagoya Univ., 2.Kioxia Corp., 3.NIFS)