3:30 PM - 3:45 PM [22p-C105-9] [Young Scientist Presentation Award Speech] High-order mode bulk acoustic wave resonators with polarity inverted Ge(Si)AlN/AlN films for high frequency filters applications 〇Jun Sekimoto1, Masashi Suzuki1, Shoji Kakio1 (1.Univ. of Yamanashi)