Yuji Mukaiyama

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:30 PM - 3:30 PM P12 (Arena)

Poster presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[22p-P12-1~3] 15.7 Crystal characterization, impurities and crystal defects

1:30 PM - 3:30 PM

[22p-P12-1] Investigation of Behavior of Intrinsic Point Defects Formation during Cz Heavy-Doped Silicon Growth by Numerical Modeling

〇Yuji Mukaiyama^1,2, Koji Sueoka³ (1.Graduate School of Okayama Pref. Univ., 2.STR Japan K.K., 3.Okayama Pref. Univ.)