Fumikazu Mizutani

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 10:00 AM - 11:30 AM A401 (A401)

Oral presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[23a-A401-1~6] 6.3 Oxide electronics

10:45 AM - 11:00 AM

[23a-A401-4] Atomic layer deposition of ZnO thin films using a novel liquid precursor, Zn(Cp^pm)₂.

〇Fumikazu Mizutani¹, Makoto Mizui¹, Nobutaka Takahashi¹, Mari Inoue², Toshihide Nabatame² (1.Kojundo Chem. Lab., 2.NIMS)