ZHIZHI LIU

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:00 AM - 11:45 AM B101 (B101)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[23a-B101-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:30 AM - 10:45 AM

△ [23a-B101-6] Development and basic performance evaluation of dielectric barrier discharge device using transparent electrode to realize simultaneous UV/NIR and plasma treatment

〇ZHIZHI LIU¹, Motoaki Yamauchi¹, Mao Xu¹, Taiki Osawa¹, Akitoshi Okino¹ (1.FIRST, Tokyo Tech.)